In fields such as semiconductor manufacturing, aerospace experimental equipment, metallurgical vacuum processing, and high-energy physics experiments, a stable and reliable high vacuum environment is a prerequisite for the normal operation of the system. As the core working medium of the diffusion pump, the performance of vacuum diffusion pump oil directly determines the ultimate pressure, operating efficiency, and equipment life of the entire vacuum system.



Silicone polymer-based vacuum diffusion pump oils feature high thermal stability, low vapor pressure, and excellent antioxidant properties. They resist cracking and carbonization even under prolonged operation at high temperatures, effectively extending diffusion pump oil change intervals and reducing maintenance frequency. Their extremely low volatility minimizes oil return during operation, maintaining vacuum system cleanliness and preventing contamination of sensitive components such as electron beam sources, optical components, and chip carriers.

This type of silicone fluid is suitable for diffusion pump systems requiring ultra-high vacuum environments of 10⁻⁶ to 10⁻⁸ Torr and is compatible with most metal pump bodies and sealing materials. It is widely used in semiconductor process equipment (such as PVD and CVD), solar cell production lines, vacuum coating systems, scientific particle accelerators, and high-voltage power vacuum testing equipment.

To adapt to more demanding operating conditions, some high-end vacuum diffusion pump fluids feature molecular weight control and optimized viscosity gradients, offering enhanced thermal and oxygen stability and resistance to decomposition. As vacuum technology demands higher extreme pressures, cleanliness, and durability, silicone-based diffusion pump fluids are continuously being upgraded to ensure stable operation of high-end equipment under critical operating conditions.